8163A/B, 8164A/B, 8166A/B User’s Guide 391Error Messages 14error message Main Temperature Selftest Failed (error value)description Checks whether the temperature sensors are within given limitserror value 23021 internal temperature sensor above limit23022 T_FIRE_DIODE is possibly not connected23023 T_OPTIZ_DIODE is possibly not connected23024 T_BASEPLATE is possibly not connectedaction Please return the unit to your local service center for repairerror message Main Power Loop Selftest Failed (error value)description Verifies the electronic of the power loop regulatorerror value 23051 power loop CW path failed23052 power loop modulation path failed23053 power loop regulator circuit failedaction Please return the unit to your local service center for repairerror message Main Shutter. Selftest Failed (error value)description Verifies the shutter drive electronicerror value 23061 shutter 1 drive electronic failed23062 shutter 2 drive electronic failedaction Please return the unit to your local service center for repairerror message Main Laser Safety Selftest Failed (error value)description Verifies if the test laser current is within limits and whether the safety current sets an alarm if a currentlimit is reached
