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Ulvac ULK-04A Instruction Manual

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Contents
  1. Table Of Contents
  2. Table Of Contents
  3. Table Of Contents
  4. For Safe Use
  5. SK00-4802-DI
  6. Leakage of high-temperature cooling water
  8. Material safety data sheet (SDS)
  9. Overview
  10. Performance specifications
  11. Figure 2: Oil diffusion vacuum pump Model No.ULK-04A, Dimensional appearance drawings
  12. Figure 3: Oil diffusion vacuum pump Model No. ULK-06A, Dimensional appearance drawings
  13. Figure 4: Oil diffusion vacuum pump Model No. ULK-10A, Dimensional appearance drawings
  14. Figure 5: Oil diffusion vacuum pump Model No. ULK-14A, Dimensional appearance drawings
  15. Mounting
  16. Oil filling
  17. Water piping
  18. Intake port pipe (Connection to vacuum chamber side)
  19. Exhaust port pipe (Piping to auxiliary pump)
  20. Electric Connection
  21. Figure 6: Connection of outside lines to terminal box for ULK-04A/ULK-06A
  22. Operation
  23. Operation start
  24. Operation stop
  25. How to Handle Thermostat (Option)
  26. Maintenance/ Inspection
  27. Oil level
  28. Figure 9: Oil replacement instruction diagram
  29. Disassembling of pump
  30. Figure 10: Nozzle pull-out instruction diagram for ULK-04A, ULK-06A
  31. Figure 12: Exploded diagram of nozzle for ULK-10A, ULK-14A
  32. Figure 13: Exploded diagram of 1st steam cylinder for ULK-10A, ULK-14A
  33. Cleaning of pump
  34. Attachment of pump in the line
  35. Figure 14: Diagram on removal of heater of ULK-04A, ULK-06A
  36. Attachment of new heater
  37. Inspection after storage for long period of time
  38. Trouble check list
  39. Disposal
  40. Warranty Clauses
  41. Response procedure
  42. Main Replacement Parts
  43. Contents
Ulvac ULK-04A Instruction Manual Manual pdf 27 page image
SK00-4802-DI-002-04No.16.10.2010Figure 3: Oil diffusion vacuum pump Model No. ULK-06A, Dimensional appearance drawings
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This manual is suitable for:
ULK-04AULK-06AULK-10AULK-14A
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