Ulvac ULK-14A manuals
ULK-14A
Table of contents
- Table Of Contents
- Table Of Contents
- Table Of Contents
- For Safe Use
- SK00-4802-DI
- Leakage of high-temperature cooling water
- Material safety data sheet (SDS)
- Overview
- Performance specifications
- Figure 2: Oil diffusion vacuum pump Model No.ULK-04A, Dimensional appearance drawings
- Figure 3: Oil diffusion vacuum pump Model No. ULK-06A, Dimensional appearance drawings
- Figure 4: Oil diffusion vacuum pump Model No. ULK-10A, Dimensional appearance drawings
- Figure 5: Oil diffusion vacuum pump Model No. ULK-14A, Dimensional appearance drawings
- Mounting
- Oil filling
- Water piping
- Intake port pipe (Connection to vacuum chamber side)
- Exhaust port pipe (Piping to auxiliary pump)
- Electric Connection
- Figure 6: Connection of outside lines to terminal box for ULK-04A/ULK-06A
- Operation
- Operation start
- Operation stop
- How to Handle Thermostat (Option)
- Maintenance/ Inspection
- Oil level
- Figure 9: Oil replacement instruction diagram
- Disassembling of pump
- Figure 10: Nozzle pull-out instruction diagram for ULK-04A, ULK-06A
- Figure 12: Exploded diagram of nozzle for ULK-10A, ULK-14A
- Figure 13: Exploded diagram of 1st steam cylinder for ULK-10A, ULK-14A
- Cleaning of pump
- Attachment of pump in the line
- Figure 14: Diagram on removal of heater of ULK-04A, ULK-06A
- Attachment of new heater
- Inspection after storage for long period of time
- Trouble check list
- Disposal
- Warranty Clauses
- Response procedure
- Main Replacement Parts
- Contents
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