44Technical DataThe specifications given here are typical values of the Nanosurf products.The exact specifications vary somewhat from instrument to instrument,and are stored on the installation CD, and can be found in the Calibrationdialog (see Software Reference).Scan ranges and resolutionMaximum XY-Scan range typ. 0.5 μm (1 μm optional)Maximum Z-range 200 nmDrive resolution Z 0.003 nmDrive resolution XY 0.015 nmgap voltage ±10V in 5mV stepsSet point current ±100nA in 25pA stepssample size max. 10mm diameterThe exact values are dependent on the calibration of the piezo elements.Drive resolution is calculated by dividing the scan range over 16 bits.easyScan electronicsMax. scan speed: 1800 data points per secondfeedback loop bandwidth: 3 kHzAdditional User ADC Input: Option availableTECHNICAL DATA