Numerik Jena RIK 4 Manual
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Contents
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SIMPLY PRECISE1. Features and ApplicationsPosition encoders in drive systems have to meet high and controversial demands, especially in lineardrive systems. The demands opposing each other are high accuracy and resolution on the one handand low mass, small dimensions and high measuring speed on the other hand.• The graduated scale is definitive for the quality of a linear encoder. Requirements for maximumposition deviations of ±2 μm per meter or less are no rarity. The emphasis is mostly on theavoidance of shortrange errors, since long-range errors, mostly linear error components, can oftenbe compensated.• The concentration of multiple axes in motion in very tight spaces, such as in semiconductor-producing machines, requires the miniaturization of the drives, guideways and encoders.• High machining speeds and therefore high accelerations make low masses of the components inmotion essential.The LIK incremental encoders for vacuum applications are equipped with features which are supposedto fulfill these high requirements in an ideal way.• Due to an interpolation circuitry which is integrated in a 15-pin D-sub connector, a resolutions downto 50 nm is possible without any additional electronics.• The permissible traversing speed for a sinusoidal signal output amounts to 10 m/s. A Square wavesignal output with a resolution of 0.1 μm allows a permissible traversing speed of 1.6 m/s.• The short-range position errors (interpolation errors) were significantly reduced by introducing anelectronic compensation of amplitude and offset deviations of the coarse signals. This compensationfunctions without following error in all velocity ranges.Additional features:• Suitable for vacuum applications up to 10-9 mBar (UHV) atmospheric pressure• Bake out cycles of 12 h and 150°C possible• UHV-components will be delivered precleaned• Possibility of electronic signal adjustment / optimization after mounting(an electronic signal adjustment after achieving the final pressure is recommended)Typical Applications:• Production and inspection machines for the semiconductor industry• Linear units, drives and coordinate tables• Positioning and measuring devices4 |
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