Zeiss MultiSEM 505 Instruction Manual

Also see for MultiSEM 505 Series: Instruction manual

mä~ëã~=`äÉ~åÉê=^ÇÇ=çå=Ñçê=jìäíápbj =P=çÑ=OO`çåíÉåíë1. About this manual ................................................................................................. 51.1. Definition of terms...................................................................................................... 72. Safety summary..................................................................................................... 82.1. Intended use ............................................................................................................... 82.2. Prevention of accidents and of improper use ......................................................... 93. Description........................................................................................................... 103.1. Overview ................................................................................................................... 103.2. Principle of operation .............................................................................................. 113.3. Technical data .......................................................................................................... 123.4. Customer service ..................................................................................................... 134. Installation............................................................................................................ 135. Operation.............................................................................................................. 145.1. Switching on the Plasma Cleaner Add On............................................................. 145.2. Switching off the Plasma Cleaner Add On............................................................. 166. Maintenance and repair ...................................................................................... 176.1. Repair ........................................................................................................................ 176.2. Troubleshooting ....................................................................................................... 177. De-installation and disposal............................................................................... 188. Abbreviations....................................................................................................... 18