xv167109-1CDHW1482308ContentsMS1659.4.3 Gas Discharging Procedure .......................................................................... 9-199.4.3.1 Necessary Devices................................................................................ 9-199.4.3.2 Gas Discharging Procedures 9.4.4 Gas Injecting Procedure ..................................................................................... 9-229.4.4.1 Necessary Devices................................................................................ 9-229.4.4.2 Gas Injecting Procedures ...................................................................... 9-229.5 Notes for Maintenance..................................................................................................... 9-249.5.1 Battery Pack Connection .................................................................................... 9-2410 Recommended Spare Parts........................................................................................................ 10-111 Parts List ..................................................................................................................................... 11-111.1 S-Axis Unit ..................................................................................................................... 11-111.2 L-Axis Unit ..................................................................................................................... 11-311.3 URBT-Axes Unit ............................................................................................................ 11-611.4 U-Arm Unit ..................................................................................................................... 11-811.5 Wrist Unit ..................................................................................................................... 11-1015 of 100