page 29 of 64Operation principle of the VSK 3000The VSK 3000 is equipped with a capacitive pressure transducer withceramic diaphragm to measure the actual pressure independent of thegas type and depending on the vacuum, i.e., absolute.The pressure value is displayed with a resolution of 0.1 Torr (mbar) in thepressure range from 0.1 to 795 Torr (0.1 to 1060 mbar).Operation principle VSP 3000The pressure transducer VSP 3000 relies on the fact that the thermalconductivity of the residual gas in the vacuum chamber is a measure forthe gas pressure. The thermal conductivity of gases is proportional to thepressure within a certain range and is related to the molecular mass.The thermal conductivity of gases and vapors varies with their molecularmass. Therefore the pressure measurement is dependent on the gastype. The pressure transducer has been adjusted for air at the factory.Diagram: Gas dependence of a VSP 3000true pressure [mbar]displayed pressure [mbar]airheliumargon+ Pressure of gases with similar mass, such as O2 or CO, can be readoff directly within the uncertainty of the measurement.+ With gases of lower or higher mass (H2, He, Ar, CO2) it is recommend-ed to readjust the VSP 3000 using the gas to be measured.Notes on operation