LHM2A*RDA001A/E7 - 107.2.6 Machine test programPurpose: Specifying the malfunction or maladjustment spot with “Machine Test” when thetrouble results from the processing chamber. [Lex 1000] [Lex Drill]1. Turn on the Lex 1000 and Lex Drill.2. Press while pressing to display theParameter screen.3. Press to select “Machine Test”, then press.4. Press or to select the desired item.5. [V Axis]1) Displays the V (vertical) axis origin sensorbetween ON and OFF.(ON: blue, OFF: white)6. [H Axis]1) Displays the H (horizontal) axis originsensor between ON and OFF.(ON: blue, OFF: white)7. [θ Axis]1) Displays the θ axis origin sensor betweenON and OFF.(ON: blue, OFF: white)
