Zeiss GeminiSEM Series Instruction Manual

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9 Technical Data and Conformity | 9.2 Performance Data and Specifications | GeminiSEM 360 ZEISSParameter DescriptionAsB detector (optional):Four-quadrant solid state BSD diode (each segment 10 mm²) inte-grated in the Gemini objective lens for the detection of angular selec-tive backscattered (AsB) electrons. BSD imaging is possible at accelera-tion voltages above 1 kV. Allows operation at short working distance.Modified instrument resolution because of the 2 mm additionalheight of the AsB detector is indicated in the resolution values. TheWD indication is automatically corrected, i.e. the displayed WD is thereal distance between the specimen surface and the AsB detector bot-tom side. Enables in-situ 3D surface reconstruction and quantitative3D metrology.AsB4 detector (optional):Four-quadrant solid state BSD diode (each segment 10 mm²) inte-grated in the Gemini objective lens for the detection of angular selec-tive backscattered (AsB) electrons. The detector has the same func-tionality as the AsB detector with an additional four channel amplifierfor parallel detection of the four segment signals. Enables in-situ 3Dsurface reconstruction and quantitative 3D metrology.aSTEM detector (optional):Pneumatically retractable multi-mode annular Scanning TransmissionElectron Microscopy (aSTEM) detector, with 12x specimen holder; en-ables bright field (BF), dark field (DF), oriented dark field (ODF), andhigh angle annular dark field (HAADF) transmission imagingC2D detector (optional):Cascade Current Detector for detecting SE signal under variable pres-sure with high efficiency.Detector with floating amplifier electronics, for enhanced imaging inVariable Pressure mode up to 500 Pa. Delivers detail at low kV forspecimens that demand higher pressures, e.g. polymers, bio speci-mens, powders, and fibers. Enhanced signal-to-noise ration versusVPSE detector.CL detector (optional):Cathodoluminiscence (CL) chamber detectorSCD detector (optional):The specimen current detector (SCD) detects the current absorbed bythe specimen.SE detector:Everhart-Thornley SE detector with optically coupled photomultiplier;collector bias adjustable from −250 to +400 VVPSE detector (optional):Light detector for detecting SE signal under variable pressure (VP)with high speed.YAG detector (optional):Manual retractable, high speed 1 sector scintillator based BSE detec-tor.Chamber camera Color CCD camera with white-light illumination and IR illumination.138 Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000