Zeiss GeminiSEM Series Instruction Manual

Also see for GeminiSEM Series: Instruction manual

5 Commissioning and First Operating Steps | 5.7 Finding Appropriate Detector Settings ZEISS3. Adjust the EHT, working distance (WD), and collector voltage according to the suggestionsin the table in order to optimize the image.5.7.5 Setting up the C2D DetectorThe C2D detector collects gas cascade electrons produced by C2D bias-accelerated secondaryelectrons in the chamber under VP conditions.Fig. 44: C2D image of a mothThe following settings are recommended for the C2D detector:EHT Typical WD Detector Settings1–30 kV 7–10 mm C2D Bias§ Adjustable from 0 % to 100 %§ Typical: 80 %A too high bias causes electrical breakdownin the detector. If you observe bright lines orflashing in the image reduce the C2D Biasuntil the artifacts disappear.Beamsleeve bias should be set to 0 VTo reduce image disturbances, do not usescan speeds faster than 4.Procedure 1. In the GeminiSEM Control panel, select the Imaging tab.2. From the Signal A drop-down list, select C2D F2.3. Open the Panel Configuration Bar.4. Double-click C2D Control to open the C2DControl panel.5. Select C2D Gain = Low.6. Adjust the C2D Bias scroll bar to 80 %. This is usually a good start value.94 Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000