Zeiss GeminiSEM Series Instruction Manual

Also see for GeminiSEM Series: Instruction manual

5 Commissioning and First Operating Steps | 5.5 Modifying Gun Parameters ZEISSInfoAfter switching the gun mode, you can immediately work with the selected gun mode. For ap-plications, which require a high probe current stability, wait 24 hours until a stability of 0.2 %/h is reached. It is recommended not to change the gun mode during quantitative specimenanalysis.Procedure 1. From the Menu Bar, select Tools > User Preferences.à The User Preferences dialog is displayed.2. Select User > Expert Gun Mode.3. Click in the Value field and select Yes.4. Close the User Preferences dialog.5. In the Panel Configuration Bar, double-click GeminiSEM Control.6. In the GeminiSEM Control panel, select the Control tab.7. In the Beam section, click one of the following buttons:To switch to Imaging gun mode, click Imaging.To switch to Normal gun mode, click Normal.To switch to Analytic gun mode, click Analytic.INFO: For maximum probe current, also check the alignment of the gun.INFO: If you use the Analytic gun mode, then the lifetime of the emitter is reduced.5.5.2 Setting the Probe CurrentWith the Gemini 2 column, you can set a lower probe current to analyze surface details at a highresolution or higher probe currents for analytical purposes, e.g. to analyze the material of thespecimen.The Optimum probe current switches to a cross over free condenser setting and achieves thehighest resolution. This setting is effective for high magnifications.Lower probe currents are suitable for beam sensitive samples.InfoThe lowest probe current can be achieved in Imaging gun mode.For improved resolution, Optimum probe current and Imaging gun mode can be combined.InfoThe maximum achievable probe current depends on the currently selected EHT and the in-stalled aperture configuration.Procedure 1. In the GeminiSEM Control panel, select the Control tab.2. Double-click the I Probe readout.à The I Probe window is displayed.3. In the input field, enter the desired value.5.5.3 Continuously Modifying the Probe Current (License: OPTIPROBE)InfoOptiProbe allows you to continuously adjust the probe current. The function automatically se-lects a suitable aperture and the current mode while the extractor voltage is adjusted to meetthe probe current selected by the user.86 Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000