Zeiss GeminiSEM Series Instruction Manual

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ZEISS 2 Safety | 2.5 Safety Devices and Interlocks2.5.5 Emergency Off (EMO) Option InternalWith the Emergency Off (EMO) option, the microscope is equipped with the following additionalsafety equipment.For SEMI compliance the microscope must be equipped with the Emergency Off (EMO) Option Ex-ternal.EMO Button The EMO button is located on the plinth adjacent to the specimen chamber.The EMO button must be pressed in an emergency to cut off mains power from the microscopeand all devices connected to the AC Unit.The EMO button must always be readily accessible and operable.Up to two EMO buttons may be connected.Fig. 5: EMO buttonS2 Button The green S2 (Start) button is attached below the MAIN switch on the EMO box, mounted on thewall.The S2 (Start) button is required to confirm the setting of the MAIN switch. The Main switch cutsoff all devices connected to the EMO box from the main power supply.The S2 (Start) button must be pushed in the following cases:§ After the MAIN switch has been set to the ON position, or§ After the EMO button has been released.Fig. 6: S2 (Start) button below the MAIN switchInstruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 23