Zeiss GeminiSEM Series Instruction Manual

Also see for GeminiSEM Series: Instruction manual

Index ZEISSBiological hazard 12Burn hazard 13Chemical hazard 14Electrical hazard 14High pressure hazard 14Magnetic field hazard 15Mechanical hazard 15Radiation hazard 16Suffocation hazard 16Hazards 12Prevention 12IImageAcquisition 74, 81Optimization 83Saving 85Imaging gun mode 39, 85Initializing the stage 119InLens SE detector 42, 92Installation 67Intended use 10, 11JJoystick TV angle 120KKeyboard Shortcut 72LLicenseREDUCED 83Locking device 24Lockout/tagout 113Lockout/tagout equipment 25LOTO 25, 113Lubricating the rod 125MMain Switch 21Mains connection 134, 140, 146Maintenance 114Consumable and chemical 114interval 114schedule 114work 114MicroscopeShutdown 128Switching on 70, 71NNormal gun mode 39, 85OON/OFF switch 22Online help 72Operation 69OperatorBasic 12Training 12Optimizing the image 83OptiProbe 86, 87PPerformance dataGeminiSEM 360 133GeminiSEM 460 139GeminiSEM 560 145Preventive maintenance 12Primary electron 40Probe current 86, 87Calibration 123QQuiet Mode 29RRelated documents 9Replacing the chamber door seal 120Requirements for personnel 11Resetting the touch alarm 122SSafe operation conditions 11Safety 10, 114devices 20interlocks 20Safety label 17Safety procedures 11Saving images 85SCD detector 56, 101Scintillator 114SE detector 43, 92Secondary electron 40Service 11Setting the probe current 86Shortcuts 72ShutdownEmergency 113Finishing the work session 112Microscope 128Signal detection 40SmartSEMUser interface 62SmartSEM program suite 65SmartSEM user interface 62Software 9, 62Software manual 9Spare parts 12162 Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000

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