Zeiss GeminiSEM Series Instruction Manual

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5 Commissioning and First Operating Steps | 5.4 Acquiring an Image ZEISS3. To change the size of the scan frame, click on the small blue squares on the green borderline and drag them to the desired size.4. Focus the image in the reduced raster.5.4.7.4 Aligning the ApertureInfoAlternatively to aligning the aperture manually, use the Auto Wobble function via toolbar icon.Procedure 1. In the GeminiSEM Control panel, select the Control tab.2. In the Alignment section, click Focus Wobble.INFO: Focus wobble is a function that sweeps the acceleration voltage. If the aperture ismisaligned, a lateral and vertical shift can be observed.à The Focus Wobble window is displayed.3. To adjust the wobble intensity, use the Wobble Amplitude scroll bar.4. To accelerate the wobble speed, activate the Wobble Fast checkbox.5. In the Control tab, click Aperture.6. In the Aperture Align navigation box, use the scroll bars or the red marker to adjust theaperture alignment until there is no movement of the detail in X- and Y-direction.INFO: The specimen detail should just be pulsating without shifting.7. In the Focus Wobble window, click OFF to deactivate focus wobble.à The Focus Wobble window closes.8. Refocus the image.5.4.7.5 Selecting the Scan SpeedProcedure 1. In the Toolbar, from the Faster/Slower drop-down list, select Scan Speed = 7.Alternatively, in the GeminiSEM Control panel, select the Imaging tab, and from the ScanSpeed drop-down list, select Scan Speed = 7.à The scan speed is set to Scan Speed = 7.2. Bring the image into focus.5.4.7.6 Correcting AstigmatismProcedure 1. Ensure that the Reduced Raster function is active.2. Select a detail (e.g. a mark or an edge) on the specimen surface.Ensure that the selected detail is in the raster. You can move the stage or shift the beam forthis purpose.3. In the GeminiSEM Control panel, select the Control tab.4. Click Stigmator.5. In the Stigmation navigation box, use the scroll bars or the red marker to obtain thesharpest possible image.INFO: The specimen detail should just be pulsating without shifting.INFO: To obtain optimum results, alternately correct focus and astigmatism.6. To deactivate the reduced raster, in the Toolbar, click the Reduced Raster/Column Controlicon.84 Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000