Quorum Q150T S Instruction Manual
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Q150T Sample Preparation SystemQ150T - Instruction Manual 39 10473 - Issue 55.8 Using Outgas Source optionsIn addition to the evaporation parameters described in the previous section, you can alsoset up enhanced outgassing with the Outgas Source user parameter. This has threesettings: multiple, single or none as described in Table 10.You need to be logged in at Administrator level to access this parameter(see page 49).Table 10 Outgas Source optionsSetting ActionSingleoutgasApplies the outgas current for the outgas time once. If the vacuum max recovery timeis zero the coat cycle will automatically start. Otherwise, the current is turned off andoutgas recovery starts. In this period, the Q150T waits for the vacuum to return tothe level it was before the current was applied. This time is limited by the max outgasrecovery time parameter (default 10s). After this, the coating continuesautomatically.MultipleoutgasThe Multiple outgas option allows you to verify that out gassing is occurring and todecide to continue or repeat the outgas cycle. It applies the outgas current andoutgas recovery as above. After a cycle is completed, you are prompted to (a) carryout further out gas cycles, (b) start the coating or (c) vent the chamber.If the vacuum is less than 0.05 mbar below the vacuum after the outgassing, theCoat button changes to green to advise that further outgassing is not necessary.None Skips the outgas step and waits 5 seconds for the stage to speed up beforecommencing coating.5.8.1 Setting Outgas Source optionsTo set up outgassing options:7. Change the user group mode to Admin level (see page 49).8. Select Edit | Profiles (see page 21).9. Choose the profile you want to edit.10. Tap on Outgas source.11. Select Multiple, Single or None.12. Tap on OK to confirm the change.5.8.2 Running Multiple OutgassingWhen you run a profile modified for multiple outgassing, you are prompted to repeatoutgassing or proceed with coating (see below). Tap on the Repeat button to run another outgas cycle. Tap on the Coat button to continue with the coating following the parameters set forthe particular profile.Figure 5-6. Prompts to repeat the outgas procedure (left) and proceed withcoating (right) |
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