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Quorum Q150T S Instruction Manual

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Contents
  1. Table Of Contents
  2. Table Of Contents
  3. Table Of Contents
  4. Introduction
  5. Sputter Coating
  6. Installation
  7. Unpacking
  8. Connections
  9. Gas Connections
  10. Electrical Connections
  11. Vacuum Connections
  12. Fitting the Standard Stage
  13. Operation
  14. Running a Profile
  15. System Settings
  16. Working with Profiles
  17. Creating a New Profile
  18. Editing Profile Parameters
  19. Materials
  20. Creating a New Material
  21. Deleting a Material
  22. Application Guidelines
  23. Aluminium thin film
  24. QT FTM Terminated Sputter
  25. Metal Evaporation
  26. Pulsed Cord Evaporation
  27. Pulsed Rod Evaporation
  28. Ramped Profile
  29. The ramped current profile
  30. Adjusting coating thickness
  31. How to create a conductive carbon layer for SEM
  32. Using Outgas Source options
  33. Glow Discharge
  34. Aperture Cleaning
  35. Instrument Management
  36. Instrument Settings
  37. Network
  38. Generic Sputter
  39. Vacuum
  40. Maintenance
  41. Hardware
  42. User Management
  43. Managing User Groups
  44. Film Thickness Monitor
  45. Setting up a Network connection
  46. Network Troubleshooting
  47. Accessories
  48. Carbon Rod Insert
  49. Shaping Carbon Rods for Pulsed Evaporation
  50. Shaping Carbon Rods for Ramped Evaporation
  51. Metal Evaporation Insert
  52. Adapting the Insert for Upwards Evaporation
  53. Glow Discharge Insert
  54. Figure 7-10. Removing the shutter
  55. Rotacota Stage
  56. Slide Stage
  57. mm Stage and Gearbox
  58. Tilt Stage
  59. Film Thickness Monitor (FTM)
  60. Extended Height Cylinder
  61. Rotating Vacuum Spigot
  62. Emergency Stop Module
  63. Spares
  64. Other Accessories
  65. Service and Maintenance
  66. Troubleshooting
  67. Table 22 Warning Messages
  68. Appendices
  69. Table 25 Carbon Pulse/Rod Evaporation profile parameters
  70. Table 26 Controlled Pulse cord
  71. Table 27 Ramped profile parameters
  72. Table 28 Metal Evaporation profile parameters
  73. System Overrideable Parameters
  74. Technical Specification
  75. Sputtering Deposition Rate
  76. Return of Goods
  77. Declaration of Contamination Form
  78. Index
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This manual is suitable for:
Q150T EQ150T ESQ150T S
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