Quorum Q150T S Instruction Manual
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Q150T Sample Preparation SystemQ150T - Instruction Manual 41 10473 - Issue 55.10 Aperture CleaningThis process is designed to clean hydrocarbon contamination from SEM & TEMapertures. It is only available with Q150T E/ES models equipped with the optional metalevaporation insert.1. Fit the molybdenum boat source to the evaporation insert as described on page 59.2. Choose the QT aperture cleaning profile from the list. Edit the profile and changethe current to 10A and the time to 5 minutes.3. Run the profile.4. When the coating unit has reached ‘HiVac’ and the current reads 10 A use thestylus to slide the slider to the right or tap the Right Arrow button () to increasethe current gradually.5. Watch the metal boat and keep increasing the current until the boat glows cherryred (see below). Make a note of the current.Figure 5-7. Aperture cleaning in progress6. Slide the Z slider back to the right until the current reads zero again, and terminatethe process.7. Create a new profile based on the QT aperture cleaning profile and save with anew file name.8. Change the current to a value approximately 5-10 A below the point where theboat was glowing cherry red. Change the time to 5 minutes and save the profile.9. Remove the head.CAUTION: Take care when removing the head and aperture asit will be very hot!10. Replace the head into the coater carefully.11. Load and run the profile that has just been created.12. When the current has reached the value set in the profile use the slider or tap theRight Arrow button to slowly increase the current until the boat is glowing cherryred.13. Heat the aperture in the boat for approximately 30 seconds.CAUTION: Do not take the current beyond the point where theboat is no longer cherry red (i.e. bright yellow/white) as thiswill damage the aperture.14. After 30 seconds either slide the slider to the left or tap the Z button to zero thecurrent. The boat will stop glowing.15. Reduce the current to 0 and terminate the process or wait until the process selfterminates after 5 minutes.CAUTION: Take care when removing the head and aperture asit will be very hot! |
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