- 72 / 79 -LANGEREMV-TechnikDE-01728 Bannewitzmail@langer-emv.dewww.langer-emv.de FLS 106 IC set / FLS 106 PCB setInformation on How to Operate the FLS 106 Scanner19Checking the Measuring Set-Up before Each Use19.1A visual check of the scanner, attachments, measuring devices, DUT and cable guides should beperformed before each measurement. Should any damage be discovered, this has to be eliminatedbefore putting the scanner into service. Contact Langer EMV-Technik GmbH (chapter 24).Adjusting the Exact Height of the Probe Tip above the DUT19.2In many cases, the distance between the probe tip and the DUT has to be set exactly.The following instructions will help you make the necessary adjustments:1. Act with particular circumspect and care. The probe tips – in particular the tips of ICRprobes are very sensitive and can be easily damaged if the scanner is not adjustedcorrectly.2. Position the probe at a safe height above the desired location.3. Place the prism (Figure 109) alongside the desired location. The slanted surface of theprism acts as a mirror that allows you to observe the vertical distance between the probetip and DUT surface with the DM-CAM. The DM-CAM has to be adjusted so that thevertical distance between the probe tip and DUT can be clearly recognised by means ofthe prism.4. Move the probe down in suitable increments until it reaches the desired height. Whiledoing so, always observe the distance between the probe tip and DUT with the DM-CAMand readjust the camera's focus as required.5. The smaller the distance between the probe tip and DUT, the smaller the incrementshould be. The smallest adjustable increment is 20 μm.6. The DUT must be aligned parallel to the scanner's T-slot table to prevent the probe tipfrom touching the DUT's surface during horizontal movements, especially if the distancebetween the probe tip and DUT is very small.7. We recommend that the probe's further downward movement be blocked once thedesired height has been reached. The positioning commands can be deactivated in theChipScan-Scanner software menu under "Settings" -> "Scanner" -> "Vertical Motion" forthis purpose.Figure 109: Prism to monitor the distance between DUT and probe tip
