- 9 / 79 -LANGEREMV-TechnikDE-01728 Bannewitzmail@langer-emv.dewww.langer-emv.de FLS 106 IC set / FLS 106 PCB setScope of Delivery3FLS 106 IC Scope of Delivery *3.1Item Name of article Short name Qty.1 4-axis positioning system FLS 106 IC 12 ChipScan-Scanner software / CD-ROM CS-Scanner 13 Holder for GND 25 GND 25 holder 14 Ground plane GND 25 15 Holder for microscope camera DM-CAM holder.3 16 Digital microscope camera DM-CAM 17 Rotary unit Rotary unit 18 EMERGENCY STOP switch, external NA 5 19 User manual FLS 106 m 1----------------------------------------------------------------------------------------------------------------------------------* The scope of delivery may deviate depending on the respective order.FLS 106 PCB Scope of Delivery *3.2Item Name of article Short name Qty.1 3-axis positioning system FLS 106 PCB 12 ChipScan-Scanner software / CD-ROM CS-Scanner 13 Universal holder for Langer scanner UH DUT 14 Claw claw 01 45 Claw claw 02 46 Digital microscope camera DM-CAM 17 Probe holder for Langer scanner SH 01 18 Camera arm KA 220 19 EMERGENCY STOP switch, external NA 5 110 User manual FLS 106 m 1----------------------------------------------------------------------------------------------------------------------------------* The scope of delivery may deviate depending on the respective order.