ContentsContents6.1 Construction ...................................................................................................................................................................6-16.1.1 Outline of the Laser Exposure System......................................................................................................................................... 6-16.2 Basic Sequence ..............................................................................................................................................................6-36.2.1 Basic Sequence of Operations (laser exposure system)............................................................................................................... 6-36.3 Various Controls ............................................................................................................................................................6-36.3.1 Controlling the Laser Activation Timing..................................................................................................................................... 6-36.3.1.1 Turning On and Off the Laser Unit.................................................................................................................................................................6-36.3.1.2 Flow of the BD Signal.....................................................................................................................................................................................6-36.3.2 Controlling the Intensity of Laser Light ...................................................................................................................................... 6-46.3.2.1 APC Control....................................................................................................................................................................................................6-46.3.3 Controlling the Laser Scanner Motor .......................................................................................................................................... 6-56.3.3.1 Outline.............................................................................................................................................................................................................6-56.3.4 Controlling the Laser Shutter....................................................................................................................................................... 6-56.3.4.1 Controlling the Laser Shutter ..........................................................................................................................................................................6-56.4 Parts Replacement Procedure.........................................................................................................................................6-76.4.1 Laser Scanner Unit....................................................................................................................................................................... 6-76.4.1.1 Before Starting the Work ................................................................................................................................................................................6-76.4.1.2 Removing the Laser Scanner Unit ..................................................................................................................................................................6-76.4.1.3 When Replacing the Laser Scanner Unit ........................................................................................................................................................6-7
