Parker HannifinP Series User Guide 1686.12 Touch Probe FunctionTouch probe captures the encoder’s position value using external input(PROBE1,2) signals or theIndex(Z) pulse of the encoder.Example of using touch probeWater Mapper System of WTR (Wafer transfer robot)When multiple layers of waters are loaded on the Wafer Stack, the sensor determines theexistence of waters through a single scan. Using the water load position value, the robot’sunnecessary movements can be minimizedSensorMotorWafer StackFigure 52. Touch Probe FunctionThe position value of the encoder (Position Actual Value, 0x6064) are latched by the followingtrigger events depending on the set value. In case of simultaneous input through 2 channels, thevalues can be separately latched at each of the positive/negative edges. Trigger by touch probe 1(I/O, PROBE1) Trigger by touch probe 2(I/O, PROBE2)www.comoso.com
